What are the target materials? Target is actually a broad concept, and the three types of target materials can be divided into cylindrical, rectangular, square plate targets, and tube targets according to their external dimensions. Target materials can be divided into metal targets, polymer ceramic non-metallic targets, and alloy targets according to their materials; 2. According to materials, target materials can be divided into conventional metal targets, precious metal targets, rare earth metal targets, non-metallic targets, alloy sputtering targets, ceramic sputtering targets, etc; 3. According to the application field, it can be divided into semiconductor targets, display panel targets, solar cell targets, magnetic recording targets, etc.

Classification by target material shape:

Common targets are mostly square targets and round targets, both of which are solid targets. In the coating operation, the magnetic field generated by the circular permanent magnet on the surface of the target material is circular, and uneven erosion occurs. The uniformity of the sputtered film thickness is poor, and the efficiency of the target material is only about 20% to 30%. The currently promoted hollow tube targets can rotate around a fixed bar shaped magnetic component for a certain period of time, and the 360 ° target surface can be uniformly etched, with obvious advantages, increasing the utilization rate to 80%.

Classification by target material:

Conventional metal targets:

Aluminum target material Al, copper target material Cu, chromium target material Cr, barium target material Ba, bismuth target material Bi, cadmium target material Cd, zirconium target material Zr, zinc target material Zn, nickel target material Ni, cobalt target material Co, calcium target material Ca, niobium target material Nb, indium target material In, tungsten target material W, molybdenum target material Mo, vanadium target material V, iron target material Fe, titanium target material Ti, hafnium target material Hf, yttrium target material Y, tantalum target material Ta, lithium target material Li, magnesium target material Mg, tin target material Sn, manganese target material Y Material Mn, lead target Pb, silicon target Si, aluminum target Al, beryllium target Be, copper target Cu, scandium target Sc

Precious metal targets:

Silver target material Ag, gold target material Au, platinum target material Pt, palladium target material Pd, rhodium target material Rh, iridium target material Ir, rhenium target material Re, and ruthenium target material Ru

Rare earth metal targets:

Lanthanum target material La, cerium target material Ce, praseodymium target material Pr, neodymium target material Nd, samarium target material Sm, europium target material Eu, gadolinium target material Gd, terbium target material Tb, dysprosium target material Dy, holmium target material Ho, erbium target material Er, thulium target material Tm, ytterbium target material Yb, lutetium target material Lu

Non metallic target materials:

Graphite target C, boron target B, germanium target Ge, selenium target Se, antimony target Sb, tellurium target Te

Alloy sputtering target material:

Titanium aluminum alloy target TiAl, titanium tungsten alloy target TiW, tungsten nickel alloy target WNi, nickel chromium alloy target NiCr, nickel titanium alloy target NiTi, nickel vanadium alloy target NiV, nickel iron alloy target NiFe, iron cobalt nickel niobium alloy target FeCoNiNb, cobalt iron boron alloy target CoFeB, iron manganese alloy target FeMn, iron gallium alloy target FeGa, copper gallium alloy target CuGa, manganese gallium alloy target MnGa, tungsten rhenium alloy target WRe, iridium manganese alloy target IrMn, copper indium gallium gallium alloy target Selenium alloy target CIGS, molybdenum rhenium alloy target MoRe, indium tin alloy target InSn, gold tin alloy target AuSn, gold germanium nickel alloy target AuGeNi, gold germanium alloy target AuGe, zinc aluminum alloy target ZnAl, aluminum copper alloy target AlCu, zirconium titanium alloy target ZrTi, copper zinc tin sulfur alloy target CZTS, cobalt niobium zirconium alloy target CoNbZr, cobalt tantalum zirconium alloy target CoTaZr, terbium cobalt alloy target TbCo Terbium iron cobalt alloy TbFeCo

Classification by target application field:

1. Segmentation of semiconductor application fields

Electrode and wiring film (aluminum target, copper target, gold target, silver target, palladium target, platinum target, aluminum silicon alloy target, aluminum silicon copper alloy target, etc.);

Storage electrode thin films (molybdenum target, tungsten target, titanium target, etc.); Adhesive film (tungsten target material, titanium target material, etc.); Capacitor insulation film (lead zirconate titanate target material, etc.).

2. Subdivision of magnetic recording application fields

Vertical magnetic recording thin films (cobalt chromium alloy targets, etc.); Thin films for hard drives (cobalt chromium tantalum alloy targets, cobalt chromium platinum alloy targets, cobalt chromium tantalum platinum alloy targets, etc.);

Thin film magnetic heads (cobalt tantalum chromium alloy targets, cobalt chromium zirconium alloy targets, etc.); Artificial crystal thin films: (cobalt platinum alloy targets, cobalt palladium alloy targets, etc.).

3. Segmentation of optical recording application fields

Phase change optical disc recording film (tellurium selenide target, antimony selenide target, germanium antimony tellurium alloy target, germanium tellurium alloy target, etc.); Magnetic disc recording thin films (dysprosium iron cobalt alloy targets, terbium dysprosium iron alloy targets, terbium iron cobalt alloy targets, alumina targets, magnesium oxide targets, silicon nitride targets, etc.); Optical disc reflective film (aluminum target material, aluminum titanium alloy target material, aluminum chromium alloy target material, gold target material, gold alloy target material, etc.). Optical disc protective film (silicon nitride target, silicon oxide target, zinc sulfide target, etc.).

4. Segmentation of Display Panel Application Fields

Transparent conductive thin films (indium tin oxide targets, zinc aluminum oxide targets, etc.); Electrode wiring thin films (molybdenum target, tungsten target, titanium target, tantalum target, chromium target, aluminum target, aluminum titanium alloy target, aluminum tantalum alloy target, etc.) Electroluminescent thin films (zinc sulfide doped manganese target, zinc sulfide doped terbium target, calcium sulfide doped europium target, yttrium oxide target, tantalum oxide target, barium titanate target, etc.).

5. Segmentation of other application areas

Decorative films (titanium targets, zirconium targets, chromium targets, titanium aluminum alloy targets, stainless steel targets, etc.);

Low resistance thin films (nickel chromium alloy targets, nickel chromium silicon alloy targets, nickel chromium aluminum alloy targets, nickel copper alloy targets, etc.); Superconducting thin films (yttrium barium copper oxygen targets, bismuth strontium calcium copper oxygen targets, etc.);

Tool coated thin films (nitride targets, carbide targets, boride targets, chromium targets, titanium targets, titanium aluminum alloy targets, zirconium targets, graphite targets, etc.).