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Preparation process of chromium sputtering target material!


Mix the metal chromium powder with a particle size of 60-320 mesh and a particle size of 320-500 mesh evenly, dry and set aside. The mass ratio of metal chromium powder with a particle size of 60-320 mesh to that with a particle size of 320-500 mesh is 5:3 and 9:2, respectively;

Add the mixed metal chromium powder into the cold pressing mold, and use 700Mpa -100Mpa pressure to cold press it into shape. Keep the pressure for 1-120s and press it into a solid cylindrical chromium target blank of the required size;

Wrap the surface of the chromium target blank with wrapping paper, put it into a hot pressing mold, and put it into the furnace;

Vacuum to O-15pa, heat up to 300 ° C-400 ° C, hold for 10min-30min, continue to heat up to 600 ° C-800 ° C, stop heating, start the hot pressing facility, align the upper and lower pressure heads of the hot pressing facility, preheat and press the chromium target billet at a pressure of 8Mpa to 12Mpa for 60s-90s; Turn off the hot pressing facilities, continue to heat up to 1300 ° C-1600 ° C, and maintain insulation for 30-120 minutes; Restart the hot pressing facility, use 20Mpa to 10Mpa pressure to hot press and shape, maintain pressure for 1-10 minutes, cool to 100 ° C, and then remove from the furnace to obtain the chromium target material.

This preparation method has simple process, convenient operation, environmental friendliness, high product yield, and achieved industrial production.



  • Shaanxi Yucheng Hehui Metal Material Co., Ltd.
    Address:International New Material Industrial Park, Comprehensive Bonded Zone, Hi-tech Development Zone, Baoji, Shaanxi
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